iXL120 Dry Pumps EDWARD

iXL120 Dry Pumps EDWARD iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.

iXL120 Dry Pumps EDWARD

Features and Benefits

  • Class leading chamber pump down time reduces Total Average Cycle Time (TACT)
  • Only 0.55kW power consumption helps minimise customer cost of ownership
  • Green Mode can reduce power consumption by up to 92% during idle periods
  • Up to 35oC water supply helps reduce facility cooling water requirements
  • Extremely small and light, helping to save valuable fab space
  • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
  • Unique dual inlet arrangement allows efficient foreline routing and location options
  • Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs
MODEL iXL 120 iXL120N
Peak Speed m3/h 110 110
Ultimateg Pressure mbar 0.013 0.013
Power at ultimate kW 0.55 0.55
Power in Green Mode kW 0.045 0.045
Inlet connection Vertical/Horizontal ISO63/NW50 ISO63/NW50
Outlet connection NW25 NW25
Cooling water connection Optional Optional
Nitirogen connnection n/a 4
Water Flow l/m 1 1
Typical purge flow slm 0 5
Weight kg 59 59
Noise dB(A) 55 59


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