nEXT 240 300 400 Turbomolecular Pumps EDWARD

nEXT 240 300 400 Turbomolecular Pumps EDWARD

DIMENSIONS DATA

PERFORMANCE DATA

SPECIFICATIONS DATA

MODEL nEXT240 nEXT300 nEXT 400
Inlet flange DN100 ISO-K or DN 100CF DN100 ISO-K or DN 100CF DN100 ISO-K or DN 100CF
Inlet pumping speed (l/s) N2 240 300 400
He 230 340 390
H2 165 280 325
Compression ratio (D) N2 >1×1011 >1×1011 >1×1011
He 3×105 5×105 1×105
H2 1×104 1×104 5×104
Compression ratio (T) N2 >1×1011 >1×1011 >1×1011
He 1×105 3×105 >1×105
H2 1.5×104 1.5×105 1×104
Interstage pumping speed (l/s) N2 13 13 13
He 13 13 13
H2 11 11 11
Backing/interstage/boost ports NW25 NW25 NW25
Vent/purge port 1/8 BSPP 1/8 BSPP 1/8 BSPP
Critical backing pressure (D)(mbar) 9.5 9.5 10
Critical backing pressure (T)(mbar) 20 20 20
Maximum continuous inlet flow (nitrogen,sccm)
water cooling (40 C Ambieant) 45 95 105
Forced air cooling (35 C Ambieant) 30 115 90
Natural convectioN ( 30 C Ambieant) 10 35 45
Maximum system flange temperature during bakeout (CF only)
water cooled /force air cooled 120/115 120/115 120/115
Maximum continuous backing pressure (mbar)
water cooling (40 C Ambieant) 6 6.8 7.5
Forced air cooling (35 C Ambieant) 4.8 7 7.5
Natural convectioN ( 30 C Ambieant) 1 2.8 4
Recommended backing pump RV12/nXDS10i RV12/nXDS10i RV12/nXDS10i
Peak booster speed m3 /h (T Variants)
RV12 N2 26 26 26
nXDS10i N2 24 24 24
Normal rotational speed (rpm) 60000 60000 60000
Start time to 90% Speed (sec) D(T) 115(150) 145(190) 180(210)
Sound pressure level at 1 m (dBA) <45(+/- 3) <45(+/- 3) <45(+/- 3)
Mass (kg) D (T) ISO 5.7 (6) 5.7(6) 6.5(6.8)
CF 8.8 (9.1) 8.5(8.8) 9.5 (9.8)

 

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