STP301 Turbomolecular Vacuum Pump EDWARD

Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.

STP301 Turbomolecular Vacuum Pump EDWARD

DIMENSIONS DATA

PERFORMANCE DATA

SPECIFICATIONS DATA

MODEL STP301 STP301C
Inlet flange size VG100/ISO100/DN100CF
Pumping speed N2/H2 Litres/second 300/300
Compression ratio N2/H2 >108/2×104
Ultimate pressure
ISO inlet flange Pa (Torr) 6.5×10-6 (5×10-8)
CF inlet flange Pa (Torr) 10-8(10-10) 10-7 (10-9)
Maximum allowable inlet pressure
Ambieant cooled/water cooled Pa (Torr) 0.066 (5×10-4) 2.5(0.02)
Rated speed rpm 48000
Stop/Start time minutes 3/5
Maximum inlet flange temperature C 120
Power consumption
Start up/continuous VA 350/100
Input voltage VA 100-240
Weight pump/controller kg 11/8

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