STP451 Turbomolecular Vacuum Pump EDWARD

Edwards STP451 turbomolecular pump offers field proven reliability for use in electron microscopes, scientific instruments and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP451 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.

STP451 Turbomolecular Vacuum Pump EDWARD

DIMENSION DATA

PERFORMANCE DATA

SPECIFICATIONS DATA

MODEL STP451 STP451C
Inlet flange size ISO160 or DN160CF
Pumping speed N2/H2 Litres/second 480/46
Compression ratio N2/H2 >108/2×104
Ultimate pressure
ISO inlet flange Pa (Torr) 6.5×10-6 (5×10-8)
CF inlet flange Pa (Torr) 10-8(10-10) 10-7 (10-9)
Maximum allowable inlet pressure
Ambieant cooled/water cooled Pa (Torr) 0.066 (5×10-4) 2.5(0.02)
Maximum continuous outlet pressure
Ambieant cooled/water cooled Pa (Torr) 13 (0.1)/26(0.15)
Rated speed rpm 48000
Stop/Start time minutes 3/5
Maximum inlet flange temperature C 120
Power consumption
Start up/continuous VA 350/100
Input voltage V 100-120 or 200-240
Weight pump/controller kg 12/7

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